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Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus

机译:垂直腔表面发射激光器(VCSEL),VCSEL阵列器件,光学扫描设备和图像形成设备

摘要

A vertical cavity surface emitting laser (VCSEL) includes a semiconductor substrate, a lower reflecting mirror formed on the semiconductor substrate, and a mesa structure. The mesa structure includes an active layer, a selective oxidization layer that includes a current confined structure, and an upper reflecting mirror. A lower electrode is connected to the semiconductor substrate, and an upper electrode is connected to the upper reflecting mirror. The VCSEL emits laser light perpendicularly to the plane of the semiconductor substrate when an electric current flows between the upper electrode and the lower electrode. The semiconductor substrate is inclined with respect to (100) plane. The active layer includes a quantum well layer having a compressive strain with respect to the substrate, and a spacer layer. The spacer layer has either a compressive strain or a tensile strain with respect to the semiconductor substrate.
机译:垂直腔表面发射激光器(VCSEL)包括半导体衬底,形成在该半导体衬底上的下反射镜以及台面结构。台面结构包括有源层,包括电流限制结构的选择性氧化层和上反射镜。下电极连接到半导体衬底,并且上电极连接到上反射镜。当电流在上电极和下电极之间流动时,VCSEL垂直于半导体基板的平面发射激光。半导体衬底相对于(100)平面倾斜。活性层包括相对于基板具有压缩应变的量子阱层和隔离层。隔离层相对于半导体基板具有压缩应变或拉伸应变。

著录项

  • 公开/公告号US7991033B2

    专利类型

  • 公开/公告日2011-08-02

    原文格式PDF

  • 申请/专利权人 KEI HARA;MORIMASA KAMINISHI;

    申请/专利号US20090476689

  • 发明设计人 MORIMASA KAMINISHI;KEI HARA;

    申请日2009-06-02

  • 分类号H01S3/04;H01S5/00;

  • 国家 US

  • 入库时间 2022-08-21 18:09:36

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