首页> 外国专利> Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus

Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus

机译:垂直腔表面发射激光器(VCSEL),VCSEL阵列器件,光学扫描设备和图像形成设备

摘要

A vertical cavity surface emitting laser (VCSEL) includes a semiconductor substrate, a lower reflecting mirror formed thereon, an active layer formed on the lower reflecting mirror, a selective oxidization layer including a current confined structure, and an upper reflecting mirror. A mesa structure is formed in at least the active layer, selective oxidization layer, and the upper reflecting mirror. The VCSEL emits laser light perpendicularly to the plane of the semiconductor substrate when an electric current flows between an upper electrode and a lower electrode. The semiconductor substrate is inclined with respect to (100) plane, and the active layer includes a quantum well layer having a compressive strain with respect to the substrate, and a spacer layer. The spacer layer has either a compressive strain or a tensile strain with respect to the semiconductor substrate.
机译:垂直腔表面发射激光器(VCSEL)包括半导体衬底,在其上形成的下部反射镜,在下部反射镜上形成的有源层,包括电流限制结构的选择性氧化层和上部反射镜。台面结构至少形成在有源层,选择性氧化层和上反射镜中。当电流在上电极和下电极之间流动时,VCSEL垂直于半导体基板的平面发射激光。半导体衬底相对于(100)平面倾斜,并且有源层包括相对于衬底具有压缩应变的量子阱层和隔离层。隔离层相对于半导体基板具有压缩应变或拉伸应变。

著录项

  • 公开/公告号EP2131458B1

    专利类型

  • 公开/公告日2017-08-16

    原文格式PDF

  • 申请/专利权人 RICOH CO LTD;

    申请/专利号EP20090251433

  • 发明设计人 HARAKEI;KAMINISHIMORIMASA;

    申请日2009-05-29

  • 分类号H01S5/183;B82Y20/00;H01S5/343;H01S5/42;H01S5/34;H01S5/32;

  • 国家 EP

  • 入库时间 2022-08-21 14:07:13

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