piezoelectric microphone, speaker , microphone - speaker -in-one device and manufacturing method

摘要

The present invention is a pattern that comprises a silicon substrate and the interdigitated electrode formed on the piezoelectric plate and the piezoelectric plate formed on the insulating film, the insulating film to be deposited on top of the silicon substrate the coupling electrode polarity is arranged as a series It characterized in that the piezoelectric element forms a microphone, a micro-speaker and a microphone-speaker may provide a one-piece device. ; A piezoelectric element, a microphone, a micro speaker