CANTILEVER TYPE MICRO CONTACT PROBE WITH A HINGE STRUCTURE WHICH INCREASES PERMISSION DISPLACEMENT OF PROBE

摘要

PURPOSE: A cantilever type micro contact probe with a hinge structure is provided to remove concentration phenomenon of the stress by supplying the cantilever type minute contact probe having the hinge structure which does not receive moment.;CONSTITUTION: An attach unit(11) is attached to a probe card. An extension unit(13) has a double beam shape and spreads from the attach unit in the lateral direction. A contact unit(15) comprises a tip contacting the pad of the semiconductor chip and is perpendicularly projected in the end part of the extension unit. The hinge unit does not transfer the moment to the extension unit from the contact unit and is installed in the extension unit and electric device. The hinge unit is composed of a convex unit(16a) and a concave unit(16b) guiding the convex unit. The hinge unit comprises a gap(14) which is formed in order to keep the convex unit and concave unit.;COPYRIGHT KIPO 2010