METHOD OF DETECTING A INNER TUBE PRESSURE OF POLISHING HEAD IN CHEMICLA MECHANICAL POLISHING DEVICE

摘要

PURPOSE: the CMP devices that rubbing head CMP (chemically mechanical polishing) device of inner tube pressure detection method is provided for reducing unnecessary pause pass through detection pressure inner tube real-time informing exception. ;CONSTITUTION: a kind of pressure inner tube be measured by the following method in real time with inner tube pressure sensor (S210). Whether detection inner tube pressure determines it in the pressure limit of permission (S220). If whether the inner tube pressure detected is in the pressure limit of permission, indicator (S262) of the overpressure to outside display. If CMP processes are performed (S264) in the inner tube pressure allowed band detected. The inner tube pressure that detects simultaneously generates alarm signal in the pressure, stops (S270) with above-mentioned CMP processes. ;The 2010 of copyright KIPO submissions