CONVEYING SHAFT APPARATUS, CAPABLE OF INCREASING PROCESS EXECUTION EFFICIENCY IN A PROCESS CHAMBER BY ENHANCING THE TRANSFER RELIABILITY OF A SUBSTRATE

摘要

PURPOSE: A conveying shaft apparatus is provided to reduce slip phenomenon when transferring a substrate and effectively transfer the substrate, by improving a conveying roller.;CONSTITUTION: A conveying shaft apparatus comprises a conveying shaft(100) and a conveying roller unit(200). The conveying roller unit is inserted into and fixed to the conveying shaft. The conveying roller unit comprises a main conveying roller(210) and a surface-contact part(220). The main conveying roller is located at the end of the conveying shaft. The surface-contact part is attached to the outer rotational surface of the main conveying roller. The surface-contact part surface-contacts with a substrate to transfer the substrate.;COPYRIGHT KIPO 2010