SUBSTRATE TRANSFER APPARATUS AND A SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, WHICH A SUBSTRATE WHICH IS USED FOR MANUFACTURING A FLAT PANEL DISPLAY IS TRANSFERRED WHILE PROCESSING

摘要

PURPOSE: A substrate transfer apparatus and a substrate processing apparatus including the same are provided to reduce the number of rotating shafts and to smoothly transfer a substrate.;CONSTITUTION: A substrate transfer apparatus(100) comprises: a first rotary shaft(200) and a second rotary shaft(300) which are parallelly arranged each other and include a plurality of first protrusions and a plurality of second protrusions; and a conveyor belt(400) which is wound in the first rotary shaft and the second rotary shaft. The conveyor belt has grooves which are combined with the first protrusions and the second protrusions in the inner part which is contacted while rotating the first rotary shaft and the second rotary shaft.;COPYRIGHT KIPO 2010