CHEMICAL BOTTLE STORAGE UNIT FOR MAINTAINING THE CHEMICAL STORED IN A CHEMICAL BOTTLE AT CONSTANT TEMPERATURE AND A SUBSTRATE PROCESSING SYSTEM HAVING THE SAME

摘要

PURPOSE: A chemical bottle storage unit and a substrate processing system having the same are provided to shorten the time for a substrate treatment process by maintaining the temperature of the chemical at an appropriate temperature required for a process unit.;CONSTITUTION: A receiving box(110) accommodates one or more chemical bottle(10). One or more receiving groove(111) is prepared in the receiving box. A constant temperature unit is installed in the receiving box. The constant temperature unit maintains the chemical stored in the chemical bottle at a constant temperature. The constant temperature unit comprises a piping(121) installed in the receiving box, a fluid tank(122) connected to the piping, and a controller(130).;COPYRIGHT KIPO 2010