SUBSTRATES COATING UNIT, A SUBSTRATES TREATING APPARATUS HAVING THE SAME AND A METHOD OF TREATING THE SUBSTRATES USING THE SAME, CAPABLE OF IMPROVING THE UNIFORMITY OF A THIN FILM IN A COATING PROCESS

摘要

PURPOSE: A substrates coating unit, a substrates treating apparatus having the same and a method of treating the substrates using the same are provided to maintain the temperature of a substrate a certain level by including a temperature control member on the bottom of the substrate.;CONSTITUTION: A substrate support member(710) supports a substrate. A coating nozzle](760) sprays a coating fluid on the substrate to form a film on the substrate. A temperature-controlled member(740) is contacted with the bottom of the substrate to control the temperature of the substrate. The substrate support member comprises a spin head(711) and a rotary shaft(712). The spin head supports the center of the substrate. The rotary shaft rotates the spin head.;COPYRIGHT KIPO 2010