SUBSTRATE TRANSFER ROBOT, CAPABLE OF REDUCING THE DEFECTS OF A DEVICE DUE TO THE ERROR OF A TEACHING PROCESS, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME AND A TEACHING METHOD OF THE SAME

摘要

PURPOSE: A substrate transfer robot, a substrate processing system including the same and a teaching method of the same are provided to automatically calculate the transfer coordinate of the transfer robot based on the center point coordinate of a substrate loading unit.;CONSTITUTION: A transferring robot is arranged on an initial position(S110). The vertical movement height of the transferring robot is recognized(S120). The X-axis coordinate and the Y-axis coordinate of the central point of a substrate loading unit are calculated by rotating the transferring robot(S130). The Z-axis coordinate of the central point of the substrate loading unit is calculated by vertically moving a distance measuring unit at the X-axis and the Y-axis coordinates(S140). The final transfer coordinate of the transferring robot is calculated(S150).;COPYRIGHT KIPO 2010