TEACHING JIG FOR ALIGNING THE ROBOT OF A SUBSTRATE PROCESSING APPARATUS CAPABLE OF IMPLEMENTING THE TEACHING OPERATIONS OF TRANSFERRING ROBOTS WITH A BLADE TYPE ARM AND A FOLK TYPE ARM

摘要

PURPOSE: A teaching jig for aligning the robot of a substrate processing apparatus is provided to improve the operational efficiency and the productivity by preventing the mis-alignment of the robot. ;CONSTITUTION: A teaching jig(10) is located at the position the same as the substrate. A first measuring groove(14) is formed at the upper center of the teaching jig. A second measuring groove(16) is formed on both edges of a plate shaped body(12). An index transferring robot(30) and a main transferring robot(40) are arranged, and a buffer unit(20) is arranged between the index transferring robot and the main transferring robot. The teaching jig is mounted at the substrate slot(22) of the buffer unit.;COPYRIGHT KIPO 2011