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SILICON SINGLE CRYSTAL COOLING DEVICE AND A SILICON SINGLE CRYSTAL GROWING DEVICE INCLUDING THE SAME, CAPABLE OF REMOVING AN ADDITIONAL FILLING PROCESS OF POLY CRYSTAL SILICON
SILICON SINGLE CRYSTAL COOLING DEVICE AND A SILICON SINGLE CRYSTAL GROWING DEVICE INCLUDING THE SAME, CAPABLE OF REMOVING AN ADDITIONAL FILLING PROCESS OF POLY CRYSTAL SILICON
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机译:硅单晶冷却装置和包括该硅单晶生长装置的硅单晶生长装置,能够消除多晶硅的附加填充过程
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摘要
PURPOSE: A silicon single crystal cooling device and a silicon single crystal growing device including the same are provided to reduce manufacturing costs and improve productivity by increasing the filling quantity of the poly crystal silicon by moving a cooling pipe.;CONSTITUTION: A chamber(110) provides a space for growing a single crystal ingot. A crucible(120) is included in the inside of a chamber in order to contain the silicon solution. A heater(130) heats the crucible. A raising unit(140) raises the cable by winding a cable(141). A silicon single crystal cooling device(150) cools the silicon single crystal ingot. The silicon poly crystal cooling device includes a cooling pipe(151) and a cooling pipe lifting unit(153).;COPYRIGHT KIPO 2010
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