Development of a Silicon Process with Device Mobility >500 cm~2/V·S Suitable for Large Area Display Backplane Using Embedded Single-Crystal Silicon Particles

摘要

We report device mobility >500 cm~2/V·s in a scalable process suitable for electronic backplanes for large area OLED displays. Ceramic substrates as large as 4×4 inches were fabricated utilizing planarized regions of Single Crystal Silicon (SCS).