DRIVE CONTROL METHOD, DRIVE CONTROL APPARATUS, STAGE CONTROL METHOD, STAGE CONTROL APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS AND MEASURING APPARATUS

摘要

Provided is a drive control method for controlling an object movable in at least first direction and a second direction different from the first direction. In the method, a force to be applied to the object is controlled based on a drive signal, which drives a first actuator for moving the object in the first direction, and a disturbance correcting signal generated based on a disturbance signal in the second direction at the output end of the object.;COPYRIGHT KIPO & WIPO 2010