METHOD FOR INSPECTING ELECTRON EMISSION UNIFORMITY OF ELECTRON EMITTERS IN LARGE-SIZED FIELD EMISSION DEVICE

摘要

PURPOSE: a kind of electron emitter large size feds (LFED) checking uniform electron emission be provided to economically exploitation LFED by verifying bad electronics from electronic emitter. ;CONSTITUTION: electron beam (I) injects electronic emitter (11) and is arranged in a cathode conductor. Electron injection electronics beam impacting electron emitter and electronics come out. The electronics is detected from electronic emitter. The electronics of uniformity detection is examined. Electronics amplifies (one) by current amplifier, and confirms by using detector (30). ;The 2010 of copyright KIPO submissions