Method for inspecting electron emission uniformity of electron emitters in Large-sized Field Emission Device

摘要

A nanostructure including CNTs is used as an electron emission source, and the electron emission sources are arranged in a plurality of arrays on a cathode conductor, and a plurality of gates or lenses corresponding to the electron emission sources To a method for checking whether or not the electrons of the area field emission source device are uniformly emitted. In order to accomplish the above-described method, the present invention may include the steps of: scanning an electron beam to the electron emission source while the electron emission sources are arranged in a cathode conductor; Detecting electrons emitted from the electrons of the scanned electron beam striking the electron emission source or directly detecting electrons of the scanned electron beam at the electron emission source; And Checking uniformity of the amount of detected electrons or creating an image from the detected electrons to check uniformity of brightness; .