METHOD FOR INSPECTING ELECTRON EMISSION UNIFORMITY OF ELECTRON EMITTERS IN LARGE-SIZED FIELD EMISSION DEVICE

摘要

The present invention relates to a method for inspecting whether or not a large-sized field emission device (LFED) uniformly emits electrons, to inspect uniform dispersion and uniform electron emission of electron emitters, wherein the LFED uses a nanostructure containing carbon nano tube (CNT) as the electron emitter, the electron emitters are arranged in a multiple array shape on an anode conductor, and the LFED includes multiple gates or lenses corresponding to the electron emitter. The method comprises the following steps: scanning electron beam to electron emitters in a state that the electron emitters are arranged on an anode conductor; detecting electrons ejected from the electron emitters by collision of electrons of the scanning electron beam or directly detecting the electrons of the scanning electron beam in the electron emitters; and inspecting the uniformity of the quantity of detected electrons, or making an image from the detected electrons and inspecting brightness uniformity of the image.