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MULTIPLE COATING METHOD BY COATING AITiN FILM AND AITiSiN FILM ON THE SURFACE OF CUTTING TOOL AND MOLDS IN A PVD METHOD
MULTIPLE COATING METHOD BY COATING AITiN FILM AND AITiSiN FILM ON THE SURFACE OF CUTTING TOOL AND MOLDS IN A PVD METHOD
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机译:在PVD方法中,在切削模具和模具的表面上涂覆AITiN膜和AITiSiN膜的多重涂覆方法
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摘要
PURPOSE: A multiple coating method is provided to improve thermal resistance, abrasion resistance, and hardness.;CONSTITUTION: A multiple coating method comprises: a step of depositing ionized Ti particle on the surface of a basic material(1) connected to an cathode; a step of supplying Ti particle and coating TiN film(3) on the Ti film surface; a step of supplying Ti particle and Al particle on the surface of TiN film to coat AlTiN film(5); and a step of supplying ionized Ti particle, Al particle, and Si particle and coating AlTiSiN film(6) on the surface of AlTiN film.;COPYRIGHT KIPO 2010
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