VACUUM PROCESSING DEVICE INCLUDING A LOCK CHAMBER WHICH IS CONVERTIBLE INTO THE ATMOSPHERE ENVIRONMENT AND A VACUUM ENVIRONMENT FOR CONVEYING A TARGET OBJECT

摘要

PURPOSE: A vacuum processing device is provided to restrain the generation of the foreign material caused by suction of the air and shorten the time taking for discharging the air by adjusting the discharging rate.;CONSTITUTION: A lock chamber(65) is converted into the vacuum atmosphere and the ambient environment. A vacuum pump(44) reduces the lock chamber. A valve(144) is installed in the in-between of an exhaust line(140) connecting the vacuum pump and a lock chamber. A control means controls the opening of valve.;COPYRIGHT KIPO 2010