首页>
外国专利>
SUBSTRATE BONDING EQUIPMENT AND THE SHOCK-ABSORBING FILM SUPPLY DEVICE WHICH EFFICIENTLY SUPPLIES THE SHOCK-ABSORBING FILM BETWEEN PRESSOR AND CONNECTION OBJECTS
SUBSTRATE BONDING EQUIPMENT AND THE SHOCK-ABSORBING FILM SUPPLY DEVICE WHICH EFFICIENTLY SUPPLIES THE SHOCK-ABSORBING FILM BETWEEN PRESSOR AND CONNECTION OBJECTS
展开▼
机译:高效结合了压力和连接对象之间的减震膜的基板粘结设备和减震膜供应设备
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: The substrate bonding equipment and shock-absorbing film supply device keep the tension of the shock-absorbing film with the torque motor. Shock-absorbing between pressor and the stage are proceed efficiently.;CONSTITUTION: The substrates is arranged in the stage. Pressor adds pressure to substrate through the shock-absorbing film(210). The supply reel(230) supplies the shock-absorbing film between the stage and pressor. The return reel(250) collects the shock-absorbing film. The supporting part(220) supports the supply reel and return reel in order to be possible to rotate. Controller controls the rotation angle of the supply reel.;COPYRIGHT KIPO 2011
展开▼