ATMOSPHERIC LOW TEMPERATURE MICRO PLASMA SPRAYING DEVICE FOR BIO-MEDICAL APPLICATION, CAPABLE OF SPRAYING PLASMA WHICH HAS LOW TEMPERATURE AND HIGH CURRENT DENSITY WITH A LOW VOLTAGE

摘要

PURPOSE: An atmospheric low temperature micro plasma spraying device is provided to manufacture the diameter of fine electrodes of an electrode which sprays plasma by using a micro-machining process like a MEMS(Micro Electro Mechanical system).;CONSTITUTION: An electrode(1) spraying plasma is used as an anode. Gas is inserted from the outside to a gas injection tube(5). The gas injection tube is used as a cathode. A porosity insulating material insulates the electrode and the gas injection tube between the electrode and the gas injection tube. The porosity insulating material has a plurality of through-holes passing through the inserted gas from the gas injection tube to the electrode. A protecting duct(4) insulates the gas injection tube from the outside. An insulation case(3) surrounds a part which is connected to the porosity insulating material among the electrode, the porosity insulating material, and the gas injection tube. The insulation case secludes the external diffusion of the discharge which generates the plasma between the electrode and the gas injection tube.;COPYRIGHT KIPO 2011