ATMOSPHERIC LOW-TEMPERATURE MICRO PLASMA JET DEVICE FOR BIO-MEDICAL APPLICATION

摘要

There is provided an atmospheric low-temperature micro plasma jet device for bio-medical application. The plasma jet device includes an electrode used as an anode, a gas injection pipe used as a cathode, a porous insulating material, a protection pipe, and an insulating case. The electrode allows plasma to be jetted. The gas injection pipe allows gas to be injected from the outside. The porous insulating material between the electrode and the gas injection pipe insulates the electrode from the gas injection pipe and has a plurality of passing holes to allow the gas injected by the gas injection pipe to be passed to the electrode. The protection pipe surrounds the gas injection pipe to insulate and protect the gas injection pipe from the outside. The insulating case surrounds the porous insulating material which the electrode and the gas injection pipe connect and prevents the diffusion of a discharge occurring to generate the plasma between the electrode and the gas injection pipe. The plasma jet device is manufactured by micromachining such as microelectromechanical systems (MEMS) in such a way that a diameter of micro electrodes where plasma is jetted is several tens micrometers or less, thereby generating and jetting low-temperature plasma with a high current density using a low voltage under atmospheric pressure. Accordingly, the plasma jet device may be applied to be the bio-medical field using apoptosis.