Measurement of plasma density and electron temperature based on the bi-Maxwellian EEDF and non-LTE model in a low pressure spraying plasma

摘要

The non-Maxwellian distribution is possible for the case of low-pressure spraying plasma and edge plasma of atmospheric spraying plasma. In this work, the non-Maxwellian distribution of electrons was measured by using an electric probe installed on the fast scanning probe system, and non-LTE effects were measured by using the optical emission spectroscopy system. Distribution of the electrons of a low-pressure spraying plasma is observed not as Maxwellian but as bi-Maxwellian by the measurement of the single probe. Non-LTE characteristics of a low-pressure spraying plasma, can be deduced from the measured results of the optical emission spectroscopy and is analyzed by the collisional radiative equilibrium (CRE) model, where the Maxwellian and the non-Maxwellian distributions are assumed for comparison. For the electron temperature, the results from optical emission spectroscopy were similar to the results from the single probe (3/spl sim/5% in error).