AUTO-FOCUS CALIBRATION METHOD OF THE PHOTOMASK ESTABLISHING THE FOCUS VALUE FOR THE PHOTOMASK INSPECTION

摘要

PURPOSE: The auto-focus calibration method of photomask is proceed the calibration for the inspection point of the back sight pattern. The focus value for the photomask inspection is instituted.;CONSTITUTION: It is subjected in the frame area of photomask(100) having the main chip area(110) and frame area(120) the focus calibration. The back sight pattern(130) is formed. The calibration is proceed for the inspection point of the back sight pattern and the focus value for the photomask inspection is instituted. The back sight pattern is formed including the light-shielding layer or the phase shift layer.;COPYRIGHT KIPO 2011