PROBE FOR A GEOMETRY-MEASURING APPARATUS AND A GEOMETRY-MEASURING APPARATUS WHICH CAN DETECT THE MEASURED SURFACE OF AN ARBITRARY SHAPE AT THE LOW SIDE ENERGY

摘要

PURPOSE: A probe for a geometry-measuring apparatus and a geometry-measuring apparatus which can detect the measured surface of an arbitrary shape at the low side energy are provided to measure a shape similar to a horizontal plane.;CONSTITUTION: A probe for a geometry-measuring apparatus comprises an attach part(2), a straight moving part(6), a shaking part(3) and a connecting device(4). The attach part is attached to a geometry-measuring apparatus(201). The straight moving part is supported about the attach part in the gravity direction. The shaking part comprises an arm including a stylus(121) contacting with a test side(61) of a measurement object(60) in the leading edge. The connecting device supports the shaking part in the straight moving part. The connecting device comprises support and loader.;COPYRIGHT KIPO 2011