EVAPORATOR AND A VACUUM DEPOSITION APPARATUS INCLUDING THE SAME TO PREVENT THERMAL DAMAGE OF A SUBSTRATE OR FILM

摘要

PURPOSE: An evaporator and a vacuum deposition apparatus including the same are provided to improve the uniformity of a film and reduce the loss of organic compounds because evaporation elements for injecting an organic compound are different in length.;CONSTITUTION: An evaporator(300) comprises a crucible(310), a crucible cover(320), a blocking plate(340), and a plurality of evaporation elements(330). An organic compound is stored inside the crucible. The crucible cover covers the opening of the crucible. The blocking plate is installed in the crucible cover to block the heat transfer. The evaporation elements are at fixed intervals to spread evaporated organic compounds from the crucible.;COPYRIGHT KIPO 2011