ATOMSPHERIC PRESSURE PLASMA APPARATUS AND ATOMSPHERIC PRESSURE PLASMA CONTAMINATION PROCESSING APPARATUS

摘要

PURPOSE: An atmospheric pressure plasma apparatus and a contaminant processing apparatus using atmospheric pressure plasma are provided to protect environment by reducing the used amount of water and detergent. CONSTITUTION: A first electrode(14) includes a tapered part(14a) which is symmetric in a first direction. A second electrode(12) is arranged around the tapered part of the first electrode. The second electrode includes a plasma outlet(17) in the first direction. Power supply(18) is in connection with the first electrode. A gap between the tapered part and the second electrode are constant. The gap provides a discharging space(23).