APPARATUS FOR GENERATING HIGH DENSITY PLASMA, CAPABLE OF SECURING THE SUPERIOR GAP-FILLING CHARACTERISTIC WITHOUT THE INCREASE OF A PROCESSING TIME

摘要

PURPOSE: An apparatus for generating high density plasma is provided to form a magnetic mirror in a chamber by inserting a mirror coil into an inductively coupled plasma type high density plasma machine.;CONSTITUTION: An apparatus for generating high density plasma includes a chamber(200), coils(210, 212), and an electrostatic chuck. The chamber is a dome shape and provides a space for generating plasma. The electrostatic chuck is located on the center of the chamber. A plurality of gas spraying injectors sprays a source gas to the upper side of a semiconductor substrate which is loaded on the electrostatic chuck.;COPYRIGHT KIPO 2011