PROCESS INFORMATION MANAGING DEVICE, RECORDING MEDIUM HAVING A PROGRAM THEREON AND PROCESS INFORMATION MANAGING METHOD

摘要

[PROBLEMS] The conventional process information managing device has a problem that a user can know only two types of information, i.e., whether two or more recipe are identical or not identical as a difference between them. [MEANS FOR SOLVING PROBLEMS] A recipe storage unit stores one or more recipe as information on a process held by one or more control devices controlling one or more processing devices performing a predetermined process on a substrate to be processed while correlating the recipe to the one or more control devices and contains a master recipe as a reference recipe. A process information managing device acquires difference information as information on a difference between the master recipe and the one or more recipe, i.e., one of the three or more types of difference information for each of the one or more recipe, and outputs the acquired difference information for each of the recipe, so that three or more types of information can be obtained.