Holographic interferometry for strain measurement of flat surfaces ELEMENTS Solid State Electronics

摘要

1. A holographic interferometer for measuring the deformations of the flat surface of solid-state electronics elements comprising the radiation source to the collimator lens, the examined object, a photographic plate, and an intermediate optical medium positioned between photographic plates and the test object, wherein the intermediate optical medium is formed as a periodic structure of protrusions and recesses. ! 2. The holographic interferometer according to claim 1, characterized in that the structure of protrusions and depressions is formed with a period of 200 to 5000 microns. ! 3. The holographic interferometer according to claim 1, characterized in that the size of the projection side to the period value is 1:10.