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Holographic interferometry for the annular surface flatness CONTROL

机译:全息干涉法用于环形表面平整度的控制

摘要

The utility model relates to an optical instrument engineering and can be used for technological purposes to control the surface flatness of polished graphite and metal parts with various types of coatings: chromium-molybdenum, and other nitrided. The object of the proposed utility model is an expansion of technological capabilities in controlling a holographic interferometer annular surfaces made of metal and graphite materials, as well as surfaces having various types of coatings used in the creation of annular seals for various purposes. The technical result is achieved in that a holographic interferometer for controlling flatness of annular surfaces having optically coupled laser, a collimator, a beam splitter for separating the laser beam into an object beam and a first reference beam, the mirror of the first reference beam projection lens, the area and the hologram recording assembly in accordance with the proposed utility model, introduced optically interconnected system mirrors the second reference beam shielding shutter having a hole in the center and posted schennaya to output from the object beam, and the opaque shutter placed in the first reference beam, the system of the second reference beam mirror mounted between the working area and node hologram registration, the shielding curtain is installed between the projection lens and a work area, and the opaque shutter is set perpendicular to the optical axis between the beam splitter and the mirror of the first reference beam to output it from the first reference beam in the hologram recording, the diameter of the second reference mirrors beam equal to the diameter hole shielding shutter, a projection lens mounted to imaging controlled items in the reverse scattered on the surface of the light rays size equal to the diameter of the second reference beam and a diameter equal to the diameter opaque shutter mirror of the first reference beam. 3 yl.
机译:本实用新型涉及一种光学仪器工程,可用于技术目的,以控制抛光的石墨和金属零件的表面平整度,这些零件具有铬钼钼和其他氮化的各种涂层。提出的本实用新型的目的是扩展控制由金属和石墨材料制成的全息干涉仪环形表面以及具有用于各种目的的形成环形密封件的具有各种涂层的表面的技术能力。通过具有光学耦合激光器的用于控制环形表面的平坦度的全息干涉仪,准直仪,用于将激光束分离为物体束和第一参考束的分束器,第一参考束投影的反射镜来实现技术效果。根据提出的本实用新型的透镜,区域和全息图记录组件,引入的光学互连系统镜面是在中心具有孔的第二参考光束屏蔽百叶窗,并贴上schennaya以从物光束输出,并且将不透明快门放置在第一参考光束,第二参考光束反射镜的系统安装在工作区域和节点全息图配准之间,遮光帘安装在投影透镜和工作区域之间,并且不透明的快门设置为垂直于光轴之间分束器和第一参考光束的反射镜,以从第一参考光束输出全息记录中的光束,第二参考镜的直径等于孔径遮光罩的直径,安装在成像控制项目上的投影透镜在反向散射的表面上散射的光线尺寸等于第二参考镜的直径光束的直径等于第一参考光束的不透明快门镜的直径。 3 yl。

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