METHOD FOR SYNTHESIS OF NANODIAMONDS AND NANOSIZED SILICON CARBIDE PARTICLES IN SILICON SURFACE LAYER

摘要

FIELD: chemistry.;SUBSTANCE: invention relates to technology of making nanostructures and can be used in making new materials in micro- and optoelectonics, light-emitting-diode lamps, power electronics and other areas of semiconductor engineering. The surface of a silicon target is exposed to pulses of accelerated carbon ions with pulse duration of the ion beam in the range of 10^-8 -10^-6 s, current density in the pulse of 10-10² A/cm², with ion energy of 10⁴-10⁶ eV and 10²-10⁴ pulses acting on the target. X-ray diffraction technique, photoluminescence and transmission electron microscopy are used to analyse the target.;EFFECT: invention increases uniformity of size of nanoparticles and simplifies realisation of the method in technological purposes.;1 tbl