首页> 外国专利> Producing silicon single crystal after zone-melting process, comprises melting bulk material in melting zone at lower end of melting rod, and contacting the melting zone with seed crystal, so that single crystal grows on the seed crystal

Producing silicon single crystal after zone-melting process, comprises melting bulk material in melting zone at lower end of melting rod, and contacting the melting zone with seed crystal, so that single crystal grows on the seed crystal

机译:区域熔化法生产硅单晶,包括在熔化棒下端的熔化区熔化块状材料,并使熔化区与籽晶接触,从而使单晶在籽晶上生长。

摘要

The method comprises melting a bulk material in a melting zone at a lower end of a melting rod (1), and contacting the melting zone with a seed crystal (4), so that a single crystal grows on the seed crystal under receiving the crystal structure of the seed crystal. The melting rod has a channel (2) running in its longitudinal axis. The channel ends at the beginning of the melting yet above the lower end of the melting rod and has a base. The base is removed by progressive melting of the rod. The bulk material in the melting zone is brought over the channel opened by removing the base. The method comprises melting a bulk material in a melting zone at a lower end of a melting rod (1), and contacting the melting zone with a seed crystal (4), so that a single crystal grows on the seed crystal under receiving the crystal structure of the seed crystal. The melting rod has a channel (2) running in its longitudinal axis. The channel ends at the beginning of the melting yet above the lower end of the melting rod and has a base. The base is removed by progressive melting of the melting rod. The bulk material in the melting zone is brought over the channel opened by removing the base. The melting rod and/or the bulk material are melted by an induction heating. The bulk material is kept in a container, which is coupled with the upper end of the melting rod. Independent claims are included for: (1) a melting rod useful in a zone-melting process for producing a single-crystal; and (2) a device for producing a silicon single crystal after a zone-melting process.
机译:该方法包括在熔化棒(1)的下端的熔化区中熔化块状材料,并使熔化区与籽晶(4)接触,使得在接收晶体的情况下,单晶在籽晶上生长。种晶的结构。熔化棒具有在其纵轴上延伸的通道(2)。通道在熔化开始时结束,但仍在熔化棒的下端上方,并具有底部。通过棒的逐渐熔化来除去碱。熔化区中的松散物料被移至通过移走底料而打开的通道上。该方法包括:在熔化棒的下端的熔化区中熔化块状材料(1),并使熔化区与籽晶(4)接触,从而在接收晶体的情况下在籽晶上生长单晶种晶的结构。熔化棒具有在其纵轴上延伸的通道(2)。通道在熔化开始时结束,但仍在熔化棒的下端上方,并具有底部。通过熔化棒的逐渐熔化除去碱。熔化区中的松散物料被移至通过移走底料而打开的通道上。熔化棒和/或散装材料通过感应加热熔化。散装物料保存在一个容器中,该容器与熔棒的上端相连。包括以下独立权利要求:(1)可用于区域熔融法生产单晶的熔棒; (2)在区域熔融工序后制造硅单晶的装置。

著录项

  • 公开/公告号DE102008030311A1

    专利类型

  • 公开/公告日2009-12-31

    原文格式PDF

  • 申请/专利权人 CRYSTAL GROWING SYSTEMS GMBH;

    申请/专利号DE20081030311

  • 发明设计人 ABEL PETER;

    申请日2008-06-30

  • 分类号C30B13/08;

  • 国家 DE

  • 入库时间 2022-08-21 18:28:53

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