Method for producing micromechanical component, involves producing micromechanical component with functional element and functional surface

摘要

The method involves producing micromechanical component (10) with functional element (12) and functional surface (13). An anti-adhesive layer (20) is produced in subregion of the functional surface, where the anti-adhesive layer has silicon carbide. The anti-adhesive layer is produced by carbonization in subregion of the functional surface. An independent claim is included for a micromechanical component.