Detector apparatus and method for simultaneous, by energydispersive x-ray absorption of backscattered electrons and x-ray quanta

摘要

The present invention relates to a detector 10 as well as a device for the simultaneous by energydispersive x-ray absorption of backscattered electrons 5 and x-ray radiation 7 after excitation of a sample 3 with primary electrons, 4. of the detector 10 comprises an energy dispersive x-ray detector element 12 and a means 11 for the reduction of the contribution of the backscattered electrons with respect to the contribution of the x-ray radiation, is arranged in front of the x-ray detector element 12. the means 11 is designed in such a way that the contribution of the backscattered electrons 5 with respect to the contribution of the x-ray radiation 7 is reduced in such a way that the characteristic peaks of the x-ray radiation 7 with respect to the measurement signal of the return movement of the litter are detectable electrons contribution 5, and at the same time, after deduction of the theoretical x-ray brake beam under bottom of the measured spectrum, a rear litter electrons contribution is detectable.