Brief description of embodiments of a structure comprising a movable element, by means of a sacrificial layer heterogeneous.

摘要

The first and second sacrificial materials are deposited on a substrate (1). The first and second units (2a, 6a) are formed respectively in the first and second sacrificial materials. The first pattern (2a) in a first sacrificial material is disposed on the second pattern (6a) in a second sacrificial material. The first pattern leaves free a zone of width defined on the periphery of an upper face of the second pattern (6a). The active layer (3) covers at least the assembly of the lateral walls of the first and second units (2a, 6a) and said predefined zone of the second pattern (6a). The active zone (3) is structured so as to allow access to the first sacrificial material. The first and second sacrificial materials are eliminated selectively form of a mobile structure comprising a free zone secured to the substrate (1) by a hooking zone