DEVICE FOR PERFORMING THE CHARACTERIZATION OF ELECTRO-OPTIC PERFORMANCES OF A SEMICONDUCTOR COMPONENT

摘要

This device for carrying out the characterization of the electro-optical performance of a semiconductor component or a batch of such components (10), under vacuum or in a controlled atmosphere, comprises: a chamber under vacuum or in a controlled atmosphere; - a measuring head provided with conductive tips (6) intended to come into contact with the electrical interfaces of said component, and connected to a data processing system to determine said electro-optical performance; a support plate designed to receive the at least one component (10), the plate being able to be cooled and to be driven by an upward and downward translation movement so as to enable the electrical interfaces of the or components with the end of the measuring tips (6) of the measuring head. The plate is provided with bosses in contact with which are positioned the components, and receives at each of these bosses two positioning grids, slidable relative to each other and cooperatively defining one with the other housing suitable for receiving the component or components to be characterized. In addition, the measuring head is also provided with mechanical tips (18), coming to bear on the inactive area of said components to ensure their maintenance on the plate.