DEVICE FOR DETECTING CRACK OF WAFER, METHOD OF DETECTING THE CRACK, DEVICE AND METHOD FOR MANUFACTURING SOLAR CELL OR SEMICONDUCTOR ELEMENT, AND SOLAR CELL OR SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a device for detecting cracks, capable of reliably detecting the cracks of a wafer.;SOLUTION: The device for detecting the cracks is configured such that a wafer 13 is positioned and held by being sandwiched between a pillar member 11 and an audio sensor 15 by interposing an elastic material; in this sandwiched state, a vibration part 19 coated with an elastic material 22 is made to collide with the wafer 13 and vibrated; vibration waveform transmitted to the wafer 13 then is detected by the audio sensor 15; and the cracks are detected based on a frequency component higher than the resonant frequency of the vibration waveform.;COPYRIGHT: (C)2012,JPO&INPIT