WAVEFRONT MEASUREMENT METHOD, WAVEFRONT MEASUREMENT DEVICE, AND MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To precisely measure wavefront even if the density of a scatterer near a focal plane is low.;SOLUTION: The wavefront measurement method includes: a contrast measurement step S2 which measures contrast of the interference pattern corresponding to respective parts of a sample which is generated by interference between the return light from a focal plane within the sample containing a scatterer with reference light; a region extracting step S3 which extracts a high contrast region in which the contrast measured in the contrast measurement step S2 is equal to a predetermined threshold value or higher; and a wavefront calculation step S4 for converting the interference pattern corresponding to the high contrast region to a wavefront data about the high contrast region that has been extracted by the region extracting step S3.;COPYRIGHT: (C)2012,JPO&INPIT