ACTUATOR ELEMENT, METHOD OF DRIVING ACTUATOR ELEMENT, METHOD OF MANUFACTURING ACTUATOR ELEMENT, DEVICE INSPECTION METHOD, AND MEMS SWITCH

摘要

PROBLEM TO BE SOLVED: To prevent sticking (sticking of an element) in an actuator element using a piezoelectric material.;SOLUTION: A base substrate (10) is arranged to oppose to a movable part including a diaphragm (24) to which a piezoelectric body (30) sandwiched between a pair of electrodes (33, 26) is bonded. The movable part is displaced in a direction approaching the base substrate (10) by application of a drive voltage to the pair of electrodes (33, 26). Polarization (Pr)-electric field (E) hysteresis characteristics of the piezoelectric body (30) are biased with respect to an electric field, and by application of a voltage in an opposite direction to the drive voltage to the pair of electrodes (33, 26), the movable part is displaced in a direction away from the base substrate (10). The element is prevented from sticking by the driving in the opposite direction. An applied electric field during the sticking preventing driving is equal to or less than the coercive electric field of the piezoelectric body (30), preferably, 10 to 80% of the coercive electric field.;COPYRIGHT: (C)2011,JPO&INPIT