METHOD OF MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE, PHOTOELECTRIC CONVERSION DEVICE HAVING SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM, SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM, PHOTOELECTRIC CONVERSION DEVICE, AND APPARATUS FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a photoelectric conversion device having high power generation efficiency at low cost.;SOLUTION: In the method of manufacturing the photoelectric conversion device 100 including a transparent electrode layer 2 and a photoelectric conversion layer 3 on a substrate 1, a process of forming the transparent electrode layer 2 includes: a coating step of coating at least one of the substrate 1 and photoelectric conversion layer 3 with a transparent electrode layer material; a half-drying step of half-drying the transparent electrode layer material applied in the coating process; an unevenness forming step of pressing the transparent electrode layer 2 half-dried in the half-drying step using one or more rolls each having a predetermined uneven shape on an outer peripheral surface to impart a predetermined uneven shape on the surface; and a drying step of drying the transparent electrode layer 2 having the uneven shape formed in the unevenness forming step.;COPYRIGHT: (C)2011,JPO&INPIT