THERMAL STRESS CRACKING FOR BRITTLE MATERIAL BY WIDE REGION NON-UNIFORM TEMPERATURE DISTRIBUTION

摘要

PPROBLEM TO BE SOLVED: To provide a method and a device which achieve both of high cracking speed and high cracking position precision without generating thermal damage on a workpiece by the heating of a material in high quality thermal stress cracking for a brittle material which does not generate cullets and microcracks which have been inevitable in the conventional mechanical scribing method. PSOLUTION: In a region wide as much as possible on a workpiece, a non-uniform heating temperature distribution of relatively low temperature which is slowly distributed is provided so as to reduce heating temperature for generating stress, and the thermal damage of the workpiece is prevented. Besides, heating energy concentrated on a relatively micro region as a cracking position decision factor is superimposed on the heating temperature distribution, also, the position is off-set, or negative feedback control is performed, and further, if required, positive feedback control is performed so as to improve cracking position precision. As the heating laser, a COSB2/SBlaser, an Er:YAG laser capable of achieving full-cuts or an FeSP+2/SP:ZnSe laser capable of selectively achieving full-cuts and extremely deep scribes at various sheet thicknesses is used. PCOPYRIGHT: (C)2011,JPO&INPIT