The chuck which loads the mannered null substrate which exchanges the top board of the vacuum chamber of the exposure device

摘要

PROBLEM TO BE SOLVED: To improve productivity by exchanging a top plate in a negative pressure chamber in a short time.;SOLUTION: The transparent top plate 21 is disposed on the upper side of an opening of a mask holder 20 to form the negative pressure chamber together with a mask and the mask holder 20. By applying a negative pressure which compensates a mass per unit area of the mask to the negative pressure chamber, deflection of the mask is suppressed. An X-stage 5 moves a chuck 10 to a delivery position away from the under side of the mask holder 20. The mask holder 20 has a plurality of movable holder parts 20a, 20b, 20c, 20d which form the opening and moves the holder parts 20a, 20b, 20c, 20d to expand the opening more largely than the top plate. A mask-conveying robot 50 carries out the top plate 21 mounted on a top plate-conveying pallet 41 through the expanded opening of the mask holder 20 or carries in the top plate 21 from the below of the mask holder 20.;COPYRIGHT: (C)2008,JPO&INPIT