首页> 外国专利> METHOD FOR PROMOTING SELF-ORGANIZATION OF BLOCK COPOLYMER, AND METHOD FOR FORMING SELF-ORGANIZATION PATTERN OF BLOCK COPOLYMER USING THE SAME

METHOD FOR PROMOTING SELF-ORGANIZATION OF BLOCK COPOLYMER, AND METHOD FOR FORMING SELF-ORGANIZATION PATTERN OF BLOCK COPOLYMER USING THE SAME

机译：促进嵌段共聚物自组织的方法，以及使用该方法形成嵌段共聚物自组织图案的方法

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摘要

PROBLEM TO BE SOLVED: To improve the throughput of pattern forming by the self-organization of a block copolymer.;SOLUTION: A block copolymer film 303 is formed on a substrate. Successively, a water-soluble polymer film 304 is formed on the block copolymer film 303. Afterwards, the block copolymer film 303 and the water-soluble polymer film 304 are annealed.;COPYRIGHT: (C)2011,JPO&INPIT

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公开/公告号JP2011078978A

专利类型
公开/公告日2011-04-21

原文格式PDF
申请/专利权人 PANASONIC CORP;
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申请/专利号JP20100289550
发明设计人 ENDO MASATAKA;SASAKO MASARU;
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申请日2010-12-27
分类号B05D7/24;C08L53/00;C08L101/00;G03F7/40;B05D1/36;
国家 JP
入库时间 2022-08-21 18:22:14

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