The corresponding sensor and manufacturing method P (VDF / TrFE) copolymer layer sensor

摘要

The present invention relates to the production of a matrix sensor with deposited integrated circuit (10, 12, 13) on the sensitive layer ferroelectric P (VDF / TrFE) copolymer. In order to improve yield and to simplify the fabrication, (116) is deposited on an integrated circuit a first layer of titanium to the first, this layer is etched, the electrode that is electrically connected to the integrated circuit I so as to form a matrix array. Then, P including favorable adhesion P (VDF / TrFE) copolymer, the second polymer a small percentage of about 1~10% (VDF / TrFE) copolymer, deposited on an integrated circuit is. The polymer is mixed with it, or at the bottom of the P (VDF / TrFE). Copolymers and their adhesion promoters, it is etched in a single step, and finally, the second conductive layer (120) is deposited, it is etched to form the counter electrode for a matrix array-wide that. Applications: ultrasonic image sensor. [Selection Figure 3e] FIG.