METHOD FOR MAKING P(VDF/TRFE) COPOLYMER LAYER SENSORS, AND CORRESPONDING SENSOR

摘要

The invention relates to the manufacture of a matrix sensor usinga sensitive layer of a ferroelectric P(VDF/TrFE) copolymer, deposited on anintegrated circuit (10, 12, 13).In order to simplify the manufacture and improve the yields,deposited first on the integrated circuit is a first layer of titanium (116)and itis etched in order to form a matrix array of electrodes electrically connectedto the integrated circuit; next, a P(VDF/TrFE) copolymer comprising a smallproportion of around 1 to 10% of a second polymer that favors the adhesionof the P(VDF/TrFE) copolymer is deposited on the integrated circuit; thepolymer is either underneath the P(VDF/TrFE) or blended therewith. Thecopolymer and its adhesion promoter are etched in a single step, and finallya second conductive layer (120) is deposited and it is etched in order to forma counter electrode for the whole of the matrix array.Application: ultrasonic image sensors.