Failure factor estimation method, failure factor estimation device, program, and recording medium

摘要

PPROBLEM TO BE SOLVED: To provide a defective factor estimating method capable of estimating the defective factor without overlooking a processing chamber which causes a defective product even if a manufacturing device uses a plurality of processing chambers. PSOLUTION: The method comprises a step of producing a division table for every manufacturing line (process 103), a step of estimating whether or not each manufacturing line causes the defective product using this division table (process 103, process 104), and a step of outputting an estimated result whether or not the manufacturing line causes the defective product (process 107). PCOPYRIGHT: (C)2009,JPO&INPIT