Being production manner of the piezoelectric body component which produces the production manner of the piezoelectric body component,

摘要

PPROBLEM TO BE SOLVED: To manufacture a piezoelectric material device and an inkjet recording head with high reliability. PSOLUTION: The manufacturing method of the piezoelectric material device showing an electromechanical transducing operation includes a process of generating precursors, a process of coating the precursors up to a predetermined thickness, a process of drying and degreasing the coated precursors, a process of laminating a plurality of piezoelectric material thin films after simultaneously heat treating and crystallizing a plurality of the laminated precursors, and a process of forming an upper electrode film on the laminated piezoelectric material thin films. In the process of generating the precursors, a high-molecular organic compound of 70 to 135 mol% to an amount of lead included in a piezoelectric material is included in the piezoelectric material; and the process of generating the precursors, the coating process, and the drying/defatting process are repeated predetermined times. PCOPYRIGHT: (C)2007,JPO&INPIT