The holder containment the suffering inspection body

摘要

PROBLEM TO BE SOLVED: To detect an accurate coordinate position steadily by irradiating spot light to a test object directly.;SOLUTION: A glass substrate 8 is laid on a holder 9 of the test object inspecting device and a guide-bar 40 is arranged movably in the direction of X-axis on the surface of glass substrate. A laser head 44 irradiating spot light to defects of the glass substrate is arranged on the guide-bar 40 so as to be movable in the direction of Y-axis by a second belt 42. Beam of light from the spot light is irradiated at the angle of α. During the time of macro observation, as an operation unit lets to move the guide-bar 40 and the laser head 44 in the direction of X-axis and Y-axis, the spot light can be moved to defects on the glass substrate 8. In that case, the coordinate data of driven amount of each motor is obtained by a coordinate detecting section as positional information. Finally, by moving an observing section equipped with microscopical function to coordinates position, micro observation is performed of defects.;COPYRIGHT: (C)2006,JPO&NCIPI