Board alignment method and processing apparatus equipped with the alignment function with stage and alignment function with stage

摘要

Even if the weight of the object to be processed is heavy, I will provide the alignment function stage with a low-cost can be performed easily and high precision alignment of the θ direction in particular. On the other side which has an alignment function stage with (4a) stage body to hold by opening the treated surface substrate (S), and SeMuko the surface of the substrate adsorbable freely suction means (8) , and imparts rotational force to the suction means for supplying gas supply means (9), the substrate to be rotated in the same plane as the center of rotation of the suction means the gas in the area of ​​the suction portion than in said suction means and a (10) drive means to be.